| Name |
Professor Dr. Takeshi KITAJIMA |
 |
| Field |
Electrical Equipment Engineering |
| Courses |
- Exercise on Fundamental Electromagnetic Theory
- Electrical Energy Engineering
- Gaseous Electronics
- Topics in Functional Electronic Devices (master's course)
|
| Research interests |
- Plasma Diagnostics
- Plasma-Surface Interaction
- Nanoscale Feature Fabrication by Plasma
|
| Key words |
- Optical (emission and absorption) Diagnostics of Plasmas
- Scanning Probe Microscopy (STM and nc-AFM)
- Self Assembled Nano Particles
|
| Publications |
- Functional Separation of Biasing and Sustaining Voltages in Two-Frequency Capacitively Coupled Plasma （Appl. Phys. Lett., 77, 2000）
- Two-Dimensional Periodic Alignment of Self-Assembled Ge Islands on Patterned Si (001) Surfaces (Appl. Phys. Lett., 80, 2002)
- Increased O(1D) Metastable Density in Highly Ar Diluted Oxygen Plasmas (Appl. Phys. Lett., 88, 2006)
- Diagnostics of N2 Dissociation in RF Plasmas by Vacuum Ultraviolet Emission and Absorption Spectroscopy (Plasma Sources Sci. Technol., 17, 2008)
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